Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching
Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing Fireplace Insert with Crushed Glass to its simplicity and cost-effectiveness.The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to improve etching speed as well as to adjust the etching direction u